Dipartimento di Scienze Matematiche, Fisiche ed Informatiche

Parco area delle scienze 7/A - 43124 Parma

Four-target sputtering chamber devoted to the deposition of CIGS precursors; starting from the lower position, going clockwise, there are: Mo, GaSe, Cu and InSe. (sputtering-up system, target diameter: 3-inch) Overview of the vacuum chamber. « Torna a Macchine