Insulators

Sputtering and electron beam gun assisted evaporation are routinely used for the deposition of the family oxides used for the electronic device, solar cell, electroluminescent device, gas and environmental sensor production. In particular:

• Transparent conductive oxide (TCO) such as ITO, ITO(Zr), FTO, SnO2, In2O3(F), In2O3(Si) , In2O3(Ge), ZnO, AZO, ecc...
• High energy gap oxides, SiO, SiO2, Ale2O3, ZrO, HfO, TiO2, V2O5, MoO3, WO3, Ga2O3, Bi2O3, Sb2O3 ecc....